JVSS 2023
Oct 31 - Nov 2, 2023Nagoya Congress Center
JVSS 2023
Oct 31 - Nov 2, 2023Nagoya Congress Center
[1Ba02(2022論文賞)]Spatial analytical surface structure mapping for three-dimensional micro-shaped Si by micro-beam reflection high-energy electron diffraction
*Tadashi Abukawa1, Sohei Nakatsuka, Taishi Imaizumi, Azusa N Hattori2, Hidekazu Tanaka2, Ken Hattori3(1. SRIS, Tohoku University, 2. SANKEN, Osaka University, 3. Graduate School of Science and Technology, Nara Institute of Science and Technology)
Spatially arranged surfaces on the micro-rod structure, which
was three-dimensionally (3D) architected on a Si(110) substrate have been thoroughly investigated by a system with micro-beam reflection high-energy electron diffraction (μ-RHEED) and scan- ning electron microscopy (SEM).
was three-dimensionally (3D) architected on a Si(110) substrate have been thoroughly investigated by a system with micro-beam reflection high-energy electron diffraction (μ-RHEED) and scan- ning electron microscopy (SEM).
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