OPTICS & PHOTONICS International Congress 2024
Apr 22 - Apr 26, 2024PACIFICO Yokohama, Japan
OPTICS & PHOTONICS International Congress 2024
Apr 22 - Apr 26, 2024PACIFICO Yokohama, Japan
[ALPS7-05]3D Micro-Raman Tomographic Measurement on Subsurface of Magnesium Silicide Wafer
Kazuma Watanabe1, *Teppei Onuki1, Hirotaka Ojima1, Jun Shimizu1, Libo Zhou1, Haruhiko Udono1(1. Ibaraki University)
Mg2Si, are expected to be applied to infrared photosensors and thermo-photovoltaic cells. Microscopic and tomographic observation was conducted on subsurface of magnesium silicide wafer using confocal Raman microscope to evaluate machined surface quality.