SISPAD2023
Sep 26 - Sep 29, 2023
SISPAD2023
Sep 26 - Sep 29, 2023
[P-03]Molecular Dynamics Study of Al Implantation in 4H-SiC
Sabine Leroch1, *Robert Stella1, Andreas Hössinger2, Lado Filipovic1(1. University of Technology Vienna, 2. Silvaco Ldt Europe)