SISPAD2023
Sep 26 - Sep 29, 2023
SISPAD2023
Sep 26 - Sep 29, 2023
[Session_3-02]Next Generation Gate-all-around Device Design for Continued Scaling Beyond 2nm Logic Node
*Pratik B Vyas1, Charisse Zhao1, Sefa Dag1, Ashish Pal1, El Mehdi Bazizi1, Buvna Ayyagari-Sangamalli1(1. Applied Materials Inc)