[Session_4-03]Influence of Surface Halogenation on Silane Adsorption onto Silicon Surfaces for Poly-Si Epitaxy: A Density Functional Theory Study with Neural Network Potential
*Hyunhak Jeong1, Byungjo Kim1, Youjung Kim2, Hanmei Choi2, Suyoung Yoo1, Sang Ki Nam1(1. Mechatronics Res., Samsung Electronics, 2. Semiconductor R&D Center, Samsung Electronics)
