SISPAD2023
Sep 26 - Sep 29, 2023
SISPAD2023
Sep 26 - Sep 29, 2023
[Session_5-02]Understanding the impact of polysilicon percolative conduction on 3D NAND variability
*Salvatore Maria Amoroso1, Gerardo Malavena2, Andrew Robert Brown1, Plamen Asenov1, Xi-Wei Lin1, Victor Moroz1, Mattia Giulianini2, David Gianluigi Refaldi2, Christian Monzio Compagnoni2, Alessandro Sottocornola Spinelli2(1. Synopsys Inc., 2. Politecnico di Milano)