1973 International Conference on Solid State Devices

1973 International Conference on Solid State Devices

Aug 29 - Aug 31, 1973The Tokyo Chamber of Commerce and Industry, Tokyo, Japan
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International Conference on Solid State Devices and Materials
1973 International Conference on Solid State Devices

1973 International Conference on Solid State Devices

Aug 29 - Aug 31, 1973The Tokyo Chamber of Commerce and Industry, Tokyo, Japan

[2-2]ANALITICAL CALCULATION OF THE VACANCY DISTRIBUTION AND THE SEMICONDUCTOR AMORPHIZATION DOSE DURING ION IMPLANTATION

V. V. YUDIN(1.Ministry of Electronic Industry)
https://doi.org/10.7567/SSDM.1973.2-2
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