1973 International Conference on Solid State Devices

1973 International Conference on Solid State Devices

Aug 29 - Aug 31, 1973The Tokyo Chamber of Commerce and Industry, Tokyo, Japan
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International Conference on Solid State Devices and Materials
1973 International Conference on Solid State Devices

1973 International Conference on Solid State Devices

Aug 29 - Aug 31, 1973The Tokyo Chamber of Commerce and Industry, Tokyo, Japan

[2-3]PROTON-ENHANCED DIFFUSION OF As IN Si FROM A DOPED POLYCRYSTALLINE SOURCE (DOPOS)

J. F. Gibbons, J. R. MacDonald, R. E. Tremain(1.Department of Electrical Engineering, Stanford University)
https://doi.org/10.7567/SSDM.1973.2-3
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