International Conference on Solid State Devices and Materials

1981 Conference on Solid State Devices

Aug 26 - Aug 27, 1981The Tokyo Chamber of Commerce and Industry, Tokyo, Japan

International Conference on Solid State Devices and Materials

1981 Conference on Solid State Devices

Aug 26 - Aug 27, 1981The Tokyo Chamber of Commerce and Industry, Tokyo, Japan

[A-1-2]A High-speed I2L Process / Structure for VLSI

T. Hirao, H. Ishikura, S. Ohsaki, N. Tsubouchi(1.LSI R&D Laboratory, Mitsubishi Electric Corporation)

https://doi.org/10.7567/SSDM.1981.A-1-2