International Conference on Solid State Devices and Materials

1981 Conference on Solid State Devices

Aug 26 - Aug 27, 1981The Tokyo Chamber of Commerce and Industry, Tokyo, Japan

International Conference on Solid State Devices and Materials

1981 Conference on Solid State Devices

Aug 26 - Aug 27, 1981The Tokyo Chamber of Commerce and Industry, Tokyo, Japan

[A-1-4]U-groove Isolation Technology for High Density Bipolar LSI's

Y. Tamaki, T. Kure, T. Shiba, H. Higuchi(1.Central Research Labolatory, Hitachi Ltd.)

https://doi.org/10.7567/SSDM.1981.A-1-4