International Conference on Solid State Devices and Materials
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1981 Conference on Solid State Devices
Aug 26
- Aug 27, 1981
The Tokyo Chamber of Commerce and Industry, Tokyo, Japan
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1981 Conference on Solid State Devices
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1981 Conference on Solid State Devices
Aug 26
- Aug 27, 1981
The Tokyo Chamber of Commerce and Industry, Tokyo, Japan
[A-3-1]
Microdefects in Czochralski-Grown Silicon Crystals and Their Application to Gettering Technique
Seigo Kishino(1.Musashi Works of Hitachi Ltd.)
https://doi.org/10.7567/SSDM.1981.A-3-1
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