1981 Conference on Solid State Devices

1981 Conference on Solid State Devices

Aug 26 - Aug 27, 1981The Tokyo Chamber of Commerce and Industry, Tokyo, Japan
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International Conference on Solid State Devices and Materials
1981 Conference on Solid State Devices

1981 Conference on Solid State Devices

Aug 26 - Aug 27, 1981The Tokyo Chamber of Commerce and Industry, Tokyo, Japan

[A-3-6]Chemical and Physical Roles of Individual Reactive Ions in Si Dry Etching

S. Tachi, K. Miyake, T. Tokuyama(1.Central Research Laboratory, Hitachi Ltd.)
https://doi.org/10.7567/SSDM.1981.A-3-6
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