1981 Conference on Solid State Devices

1981 Conference on Solid State Devices

Aug 26 - Aug 27, 1981The Tokyo Chamber of Commerce and Industry, Tokyo, Japan
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International Conference on Solid State Devices and Materials
1981 Conference on Solid State Devices

1981 Conference on Solid State Devices

Aug 26 - Aug 27, 1981The Tokyo Chamber of Commerce and Industry, Tokyo, Japan

[A-3-7]A Novel Technology for Self-Aligned Contact Formation

M. Sakamoto, M. Saito, K. Hamano(1.Nippon Electric Co., Ltd.)
https://doi.org/10.7567/SSDM.1981.A-3-7
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