1981 Conference on Solid State Devices

1981 Conference on Solid State Devices

Aug 26 - Aug 27, 1981The Tokyo Chamber of Commerce and Industry, Tokyo, Japan
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International Conference on Solid State Devices and Materials
1981 Conference on Solid State Devices

1981 Conference on Solid State Devices

Aug 26 - Aug 27, 1981The Tokyo Chamber of Commerce and Industry, Tokyo, Japan

[A-3-8]Ammonia annealed SiO2 films for thin gate insulator

I. KATO, T. ITO, S. INOUE, T. NAKAMURA, H. ISHIKAWA(1.FUJITSU LABORATORIES LTD.)
https://doi.org/10.7567/SSDM.1981.A-3-8
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