Aug 26 - Aug 27, 1981The Tokyo Chamber of Commerce and Industry, Tokyo, Japan
[A-4-3]IMPROVEMENT OF SOS DEVICE PERFORMANCE BY SOLID-PHASE EPITAXY
Toshio YOSHII, Shinji TAGUCHI, Tomoyasu INOUE, Hiroyuki TANGO(1.Toshiba R and D Center, Semiconductor Device Engineering Laboratory, TOSHIBA CORPORATION)