1981 Conference on Solid State Devices

1981 Conference on Solid State Devices

Aug 26 - Aug 27, 1981The Tokyo Chamber of Commerce and Industry, Tokyo, Japan
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International Conference on Solid State Devices and Materials
1981 Conference on Solid State Devices

1981 Conference on Solid State Devices

Aug 26 - Aug 27, 1981The Tokyo Chamber of Commerce and Industry, Tokyo, Japan

[A-4-4]Improvement of channel mobility in SOS/MOSFETs by laser annealing

Y. Kobayashi, T. Ikeda, M. Nakamura, T. Suzuki(1.Hitachi Research Laboratory., Hitachi Ltd.)
https://doi.org/10.7567/SSDM.1981.A-4-4
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