International Conference on Solid State Devices and Materials
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1981 Conference on Solid State Devices
Aug 26
- Aug 27, 1981
The Tokyo Chamber of Commerce and Industry, Tokyo, Japan
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1981 Conference on Solid State Devices
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1981 Conference on Solid State Devices
Aug 26
- Aug 27, 1981
The Tokyo Chamber of Commerce and Industry, Tokyo, Japan
[A-4-6]
Laser-Induced Lateral, Vertically-Seeded Epitaxial Regrowth of Deposited Si Films over Various SiO2 Patterns
M. Tamura, M. Ohkura, T. Tokuyama(1.Central Research Laboratory, Hitachi Ltd.)
https://doi.org/10.7567/SSDM.1981.A-4-6
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