International Conference on Solid State Devices and Materials

1981 Conference on Solid State Devices

Aug 26 - Aug 27, 1981The Tokyo Chamber of Commerce and Industry, Tokyo, Japan

International Conference on Solid State Devices and Materials

1981 Conference on Solid State Devices

Aug 26 - Aug 27, 1981The Tokyo Chamber of Commerce and Industry, Tokyo, Japan

[A-4-8]Trapped Ar Induced Deformation of Magnetron Sputtered Al Film Overlaid with Plasma SiN Film

H. Harada, H. Yakushiji, T. Nishioka, H. Kotani, Y. Hirata(1.LSI Research and Development Laboratory, Mitsubishi Electric Corporation Computer Development Laboratories Limited)

https://doi.org/10.7567/SSDM.1981.A-4-8