1990 International Conference on Solid State Devices and Materials
Aug 22 - Aug 24, 1990Hotel Sendai Plaza, Sendai, Japan
1990 International Conference on Solid State Devices and Materials
Aug 22 - Aug 24, 1990Hotel Sendai Plaza, Sendai, Japan
[B-3-1]A Triple-Level Interconnection Technology for High Speed 16 Kb GaAs SRAM
M. Noda, S. Matsue, M. Sakai, K. Sumitani, H. Nakano, T. Oku, H. Makino, K. Nishitani, M. Otsubo(1.Optoelectronic and Microwave Devices R & D Lab., 2.LSI R & D Lab. Mitsubishi Electric Corporation)
