1990 International Conference on Solid State Devices and Materials

1990 International Conference on Solid State Devices and Materials

Aug 22 - Aug 24, 1990Hotel Sendai Plaza, Sendai, Japan
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International Conference on Solid State Devices and Materials
1990 International Conference on Solid State Devices and Materials

1990 International Conference on Solid State Devices and Materials

Aug 22 - Aug 24, 1990Hotel Sendai Plaza, Sendai, Japan

[B-3-3]Application of Hydrogenation to Improve GaAs/Si MESFETs and IC Performance by PECVD SiN

Mingxiang Li, Qingyi Tong, Gang Zou, J. Deboeck, M. Von Rossum, G.J. Declerck(1.Microelectronics Center, Southeast University, 2.IMEC)
https://doi.org/10.7567/SSDM.1990.B-3-3
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