1990 International Conference on Solid State Devices and Materials

1990 International Conference on Solid State Devices and Materials

Aug 22 - Aug 24, 1990Hotel Sendai Plaza, Sendai, Japan
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International Conference on Solid State Devices and Materials
1990 International Conference on Solid State Devices and Materials

1990 International Conference on Solid State Devices and Materials

Aug 22 - Aug 24, 1990Hotel Sendai Plaza, Sendai, Japan

[C-2-2]Modification of the SiO2-Si System by Treatment in Atomic Hydrogen and Very Light Nitridation

I. A. Aizenberg(1.Academy of Sciences, U.S.S.R.)
https://doi.org/10.7567/SSDM.1990.C-2-2
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