1990 International Conference on Solid State Devices and Materials

1990 International Conference on Solid State Devices and Materials

Aug 22 - Aug 24, 1990Hotel Sendai Plaza, Sendai, Japan
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International Conference on Solid State Devices and Materials
1990 International Conference on Solid State Devices and Materials

1990 International Conference on Solid State Devices and Materials

Aug 22 - Aug 24, 1990Hotel Sendai Plaza, Sendai, Japan

[C-2-4]Optimization of Nitridation and Re-oxidation Conditions for an EEPROM Tunneling Dielectric

N. Ajika, M. Ohi, O. Sakamoto, H. Arima, T. Matsukawa, N. Tsubouchi(1.LSI Research and Development Laboratory Mitsubishi Electric Corporation)
https://doi.org/10.7567/SSDM.1990.C-2-4
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