1990 International Conference on Solid State Devices and Materials

1990 International Conference on Solid State Devices and Materials

Aug 22 - Aug 24, 1990Hotel Sendai Plaza, Sendai, Japan
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International Conference on Solid State Devices and Materials
1990 International Conference on Solid State Devices and Materials

1990 International Conference on Solid State Devices and Materials

Aug 22 - Aug 24, 1990Hotel Sendai Plaza, Sendai, Japan

[C-2-9]High Reliability Poly-Oxide Grown on in-situ Phosphorus Doped Amorphous Si

Takashi KOBAYASHI, Shinpei IIJIMA, Atsushi HIRAIWA(1.Central Research Laboratory, Hitachi Ltd.)
https://doi.org/10.7567/SSDM.1990.C-2-9
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