1993 International Conference on Solid State Devices and Materials

1993 International Conference on Solid State Devices and Materials

Aug 29 - Sep 1, 1993Makuhari Messe, Chiba, Japan
Back
International Conference on Solid State Devices and Materials
1993 International Conference on Solid State Devices and Materials

1993 International Conference on Solid State Devices and Materials

Aug 29 - Sep 1, 1993Makuhari Messe, Chiba, Japan

[A-1-3]High-Performance Buried-Gate MOSFETs with RTO-Grown Ultrathin Gate Oxide Films

Hisashi FUKUDA, Tomiyuki ARAKAWA, Toshiyuki OCHIAI Takahisa HAYASHI, Toshiyuki IWABUCHI(1.Semiconductor Tech. Lab., Oki Electric Industry Co., Ltd.)
https://doi.org/10.7567/SSDM.1993.A-1-3
Download PDFDownload PDF
Back