1993 International Conference on Solid State Devices and Materials

1993 International Conference on Solid State Devices and Materials

Aug 29 - Sep 1, 1993Makuhari Messe, Chiba, Japan
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International Conference on Solid State Devices and Materials
1993 International Conference on Solid State Devices and Materials

1993 International Conference on Solid State Devices and Materials

Aug 29 - Sep 1, 1993Makuhari Messe, Chiba, Japan

[A-2-1]Structure and Characteristics of 0.1μm to sub-0.1μm Devices

Mitsumasa KOYANAGI(1.Research Center for Integrated Systems, Hiroshima University)
https://doi.org/10.7567/SSDM.1993.A-2-1
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