1993 International Conference on Solid State Devices and Materials

1993 International Conference on Solid State Devices and Materials

Aug 29 - Sep 1, 1993Makuhari Messe, Chiba, Japan
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International Conference on Solid State Devices and Materials
1993 International Conference on Solid State Devices and Materials

1993 International Conference on Solid State Devices and Materials

Aug 29 - Sep 1, 1993Makuhari Messe, Chiba, Japan

[A-2-4]Superior Performance of ALD(Atomic Layer Doped) MOSFETs in 0.1-μm Regime

Kaori Nakamura, Hiromasa Noda, Shin'ichiro Kimura(1.Central Research Laboratory, Hitachi Ltd.)
https://doi.org/10.7567/SSDM.1993.A-2-4
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