1993 International Conference on Solid State Devices and Materials
Aug 29 - Sep 1, 1993Makuhari Messe, Chiba, Japan
1993 International Conference on Solid State Devices and Materials
Aug 29 - Sep 1, 1993Makuhari Messe, Chiba, Japan
[A-2-5]Impact of Contact Resistance and Junction Capacitance on the Switching Performance in Scaled 0.1μm CMOS Devices
Satoshi Inaba, Tomohisa Mizuno, Masao Iwase, Hiromi Niiyama, Makoto Yoshimi, Akira Toriumi(1.ULSI Research Laboratories, R&D Center, Toshiba Corporation)
