1993 International Conference on Solid State Devices and Materials
Aug 29 - Sep 1, 1993Makuhari Messe, Chiba, Japan
1993 International Conference on Solid State Devices and Materials
Aug 29 - Sep 1, 1993Makuhari Messe, Chiba, Japan
[D-1-2]Si Grain-Free Highly Conductive Microcrystalline SiC Films Prepared by Using Organic Silane Gas
K. Sasaki, T. Miyajima, H. Hosoya, S. Furukawa(1.Interdisciplinary Graduate School of Science and Engineering Tokyo Institute of Technology)
