1993 International Conference on Solid State Devices and Materials

1993 International Conference on Solid State Devices and Materials

Aug 29 - Sep 1, 1993Makuhari Messe, Chiba, Japan
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International Conference on Solid State Devices and Materials
1993 International Conference on Solid State Devices and Materials

1993 International Conference on Solid State Devices and Materials

Aug 29 - Sep 1, 1993Makuhari Messe, Chiba, Japan

[S-II-2]Selective Etching of Native Oxide Using Vapor HF Processing

J. M. de Larios, J. O. Borland, S. Hatada, I. Tamatani(1.Genus, Inc., Thin Film Division, 2.Sumitomo Metal Industries, Ltd., Semiconductor Equipment Div.)
https://doi.org/10.7567/SSDM.1993.S-II-2
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