1993 International Conference on Solid State Devices and Materials
Aug 29 - Sep 1, 1993Makuhari Messe, Chiba, Japan
1993 International Conference on Solid State Devices and Materials
Aug 29 - Sep 1, 1993Makuhari Messe, Chiba, Japan
[S-II-4]Correlation between Chemical Structure and Electrical Properties of NH3-Nitrided N2O Oxides
M. Bhat, G. W. Yoon, A. B. Joshi, J. Kim, J. Ahn, D. L. Kwong, M. Arendt, J. M. White(1.Microelectronics Research Center, Department of Electrical and Computer Engineering The University of Texas, 2.Department of Chemistry The University of Texas)
