1993 International Conference on Solid State Devices and Materials

1993 International Conference on Solid State Devices and Materials

Aug 29 - Sep 1, 1993Makuhari Messe, Chiba, Japan
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International Conference on Solid State Devices and Materials
1993 International Conference on Solid State Devices and Materials

1993 International Conference on Solid State Devices and Materials

Aug 29 - Sep 1, 1993Makuhari Messe, Chiba, Japan

[S-III-1]In-Situ Transmission Electron Microscopy Study of Roughness during Silicon Oxidation and Silicidation

J. M. GIBSON, X. TONG, R. D. TWESTEN, F. M. ROSS(1.University of Illinois, Department of Physics, 2.Lawrence Berkeley Laboratories)
https://doi.org/10.7567/SSDM.1993.S-III-1
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