1993 International Conference on Solid State Devices and Materials

1993 International Conference on Solid State Devices and Materials

Aug 29 - Sep 1, 1993Makuhari Messe, Chiba, Japan
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International Conference on Solid State Devices and Materials
1993 International Conference on Solid State Devices and Materials

1993 International Conference on Solid State Devices and Materials

Aug 29 - Sep 1, 1993Makuhari Messe, Chiba, Japan

[S-III-5]Local Ordering and Layer by Layer Growth of the Initial Thermal Oxide of Si(001)

Masaharu UDAGAWA, Masaaki NIWA, Isao SUMITA(1.Semiconductor Research Center, Matsushita Electric Industrial Co., Ltd., 2.Matsushita Research Institute Tokyo, Inc.)
https://doi.org/10.7567/SSDM.1993.S-III-5
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