1993 International Conference on Solid State Devices and Materials

1993 International Conference on Solid State Devices and Materials

Aug 29 - Sep 1, 1993Makuhari Messe, Chiba, Japan
International Conference on Solid State Devices and Materials
1993 International Conference on Solid State Devices and Materials

1993 International Conference on Solid State Devices and Materials

Aug 29 - Sep 1, 1993Makuhari Messe, Chiba, Japan

[S-III-6]Spatially Resolved Characterization of the Si/SiO2 System Using Conducting Atomic Force Microscopy

Murrell M. P., Welland M. E., Wong T. M. H.(1.University of Cambridge Department of Engineering)
https://doi.org/10.7567/SSDM.1993.S-III-6