1993 International Conference on Solid State Devices and Materials
Aug 29 - Sep 1, 1993Makuhari Messe, Chiba, Japan
1993 International Conference on Solid State Devices and Materials
Aug 29 - Sep 1, 1993Makuhari Messe, Chiba, Japan
[S-III-7]Characterization and Control of Native Oxide on Silicon
Mizuho MORITA, Tadahiro OHMI(1.Department of Information Science, Graduate School of Information Sciences, Tohoku University, 2.Department of Electronic Engineering, Faculty of Engineering, Tohoku University, 3.Laboratory for Microelectronics, Research Institute of Electrical Communication, Tohoku University)
