1993 International Conference on Solid State Devices and Materials

1993 International Conference on Solid State Devices and Materials

Aug 29 - Sep 1, 1993Makuhari Messe, Chiba, Japan
Back
International Conference on Solid State Devices and Materials
1993 International Conference on Solid State Devices and Materials

1993 International Conference on Solid State Devices and Materials

Aug 29 - Sep 1, 1993Makuhari Messe, Chiba, Japan

[S-III-9]Native Oxides on Si-Surfaces of Deep-Submicron Contact-Hole-Bottoms

N. Aoto, M. Nakamori, H. Hada, T. Kunio, E. Ikawa(1.ULSI Device Development Laboratories, Microelectronics Research Laboratories NEC Corporation)
https://doi.org/10.7567/SSDM.1993.S-III-9
Download PDFDownload PDF
Back