2003 International Conference on Solid State Devices and Materials
Sep 16 - Sep 18, 2003Keio Plaza Inter-Continental Tokyo (Keio Plaza Hotel), Tokyo, Japan
2003 International Conference on Solid State Devices and Materials
Sep 16 - Sep 18, 2003Keio Plaza Inter-Continental Tokyo (Keio Plaza Hotel), Tokyo, Japan
[A-1-1]Dual workfunction metal-gate FinFET devices fabricated using total gate silicidation
Jakub Kedzierski, Edward Nowak, Meikei Ieong, Thomas Kanarsky, Diane Boyd(1.IBM Semiconductor Research and Development Center (SRDC) Research Division, 2.Microelectronics Division)
