2003 International Conference on Solid State Devices and Materials

2003 International Conference on Solid State Devices and Materials

Sep 16 - Sep 18, 2003Keio Plaza Inter-Continental Tokyo (Keio Plaza Hotel), Tokyo, Japan
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International Conference on Solid State Devices and Materials
2003 International Conference on Solid State Devices and Materials

2003 International Conference on Solid State Devices and Materials

Sep 16 - Sep 18, 2003Keio Plaza Inter-Continental Tokyo (Keio Plaza Hotel), Tokyo, Japan

[A-1-3]New Self-aligned Metal-gate MOSFETs Using Aluminum Substitution Technology

S. Nakamura, H. Shido, T. Kurahashi, S. Kishii, T. Nagata, B. Kumasaka, T. Usuki, S. Sato, Y. Mishima(1.Fujitsu Laboratories Ltd.)
https://doi.org/10.7567/SSDM.2003.A-1-3
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