2003 International Conference on Solid State Devices and Materials

2003 International Conference on Solid State Devices and Materials

Sep 16 - Sep 18, 2003Keio Plaza Inter-Continental Tokyo (Keio Plaza Hotel), Tokyo, Japan
Back
International Conference on Solid State Devices and Materials
2003 International Conference on Solid State Devices and Materials

2003 International Conference on Solid State Devices and Materials

Sep 16 - Sep 18, 2003Keio Plaza Inter-Continental Tokyo (Keio Plaza Hotel), Tokyo, Japan

[A-1-4]Screening Effect on Remote Coulomb Scattering due to impurities in Polysilicon Gate of MOSFET

Takamitsu Ishihara, Junji Koga, Shinichi Takagi, Kazuya Matsuzawa(1.Advanced LSI Thechnology Laboratory, Research and Development Center,Toshiba corporation)
https://doi.org/10.7567/SSDM.2003.A-1-4
Download PDFDownload PDF
Back