2003 International Conference on Solid State Devices and Materials

2003 International Conference on Solid State Devices and Materials

Sep 16 - Sep 18, 2003Keio Plaza Inter-Continental Tokyo (Keio Plaza Hotel), Tokyo, Japan
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International Conference on Solid State Devices and Materials
2003 International Conference on Solid State Devices and Materials

2003 International Conference on Solid State Devices and Materials

Sep 16 - Sep 18, 2003Keio Plaza Inter-Continental Tokyo (Keio Plaza Hotel), Tokyo, Japan

[A-7-1]High-κ /Oxynitride Gate Dielectric - Searching for Serendipitous Materials -

Masahiko Hiratani, Shin-ichi Saito, Yasuhiro Shimamoto, Shimpei Tsujikawa, Yuichi Matsui, Osamu Tonomura, Kazuyoshi Torii, Jiro Yugami, Shinichiro Kimura(1.Advanced Research Laboratory, Hitachi, Ltd., 2.Central Research Laboratory, Hitachi, Ltd.)
https://doi.org/10.7567/SSDM.2003.A-7-1
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