International Conference on Solid State Devices and Materials
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2008 International Conference on Solid State Devices and Materials
Sep 23
- Sep 26, 2008
Tsukuba International Congress Center (EPOCHAL TSUKUBA), Ibaraki, Japan
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2008 International Conference on Solid State Devices and Materials
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2008 International Conference on Solid State Devices and Materials
Sep 23
- Sep 26, 2008
Tsukuba International Congress Center (EPOCHAL TSUKUBA), Ibaraki, Japan
[A-2-1]
Performance and Reliability of High-k/Metal Gate Stacks: Interfacial Layer Defects (Invited)
G. Bersuker
1
(1.SEMATECH, USA)
https://doi.org/10.7567/SSDM.2008.A-2-1
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