International Conference on Solid State Devices and Materials
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2008 International Conference on Solid State Devices and Materials
Sep 23
- Sep 26, 2008
Tsukuba International Congress Center (EPOCHAL TSUKUBA), Ibaraki, Japan
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2008 International Conference on Solid State Devices and Materials
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2008 International Conference on Solid State Devices and Materials
Sep 23
- Sep 26, 2008
Tsukuba International Congress Center (EPOCHAL TSUKUBA), Ibaraki, Japan
[A-3-3]
Carrier Density Mapping of Small n-MOSFET Devices by Vacuum-gap Modulation Scanning Tunneling Spectroscopy
L. Bolotov
1
, M. Nishizawa
1
, T. Kanayama
1
(1.MIRAI-AIST, Japan)
https://doi.org/10.7567/SSDM.2008.A-3-3
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