2008 International Conference on Solid State Devices and Materials
Sep 23 - Sep 26, 2008Tsukuba International Congress Center (EPOCHAL TSUKUBA), Ibaraki, Japan
2008 International Conference on Solid State Devices and Materials
Sep 23 - Sep 26, 2008Tsukuba International Congress Center (EPOCHAL TSUKUBA), Ibaraki, Japan
[A-8-2]Improvement of Metal/High-k Device Performance by 40-Milli-Second Flash Lamp Annealing by using Flexibly-Shaped-Pulse Technology
T. Onizawa1, S. Kato1, T. Aoyama1, Y. Nara1, Y. Ohji1(1.Selete, Japan)
