International Conference on Solid State Devices and Materials
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2008 International Conference on Solid State Devices and Materials
Sep 23
- Sep 26, 2008
Tsukuba International Congress Center (EPOCHAL TSUKUBA), Ibaraki, Japan
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2008 International Conference on Solid State Devices and Materials
Detail
2008 International Conference on Solid State Devices and Materials
Sep 23
- Sep 26, 2008
Tsukuba International Congress Center (EPOCHAL TSUKUBA), Ibaraki, Japan
[A-9-2]
Millisecond Rapid Thermal Annealing of Si Wafer Induced by High Density Thermal Plasma Jet Irradiation
H. Furukawa
1
, S. Higashi
1
, T. Okada
1
, H. Murakami
1
, S. Miyazaki
1
(1.Hiroshima Univ., Japan)
https://doi.org/10.7567/SSDM.2008.A-9-2
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