International Conference on Solid State Devices and Materials
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2020 International Conference on Solid State Devices and Materials
Sep 27
- Sep 30, 2020
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2020 International Conference on Solid State Devices and Materials
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2020 International Conference on Solid State Devices and Materials
Sep 27
- Sep 30, 2020
[A-1-04]
Understanding wet annealing effect on phase transition and ferroelectric phase formation for Hf
1-
x
Zr
x
O
2
film
〇Shigehisa Shibayama
1
, Jotaro Nagano
1
, Mitsuo Sakashita
1
, Osamu Nakatsuka
1,2
(1. Nagoya Univ.(Japan), 2. IMaSS, Nagoya Univ.(Japan))
https://doi.org/10.7567/SSDM.2020.A-1-04
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