2020 International Conference on Solid State Devices and Materials

2020 International Conference on Solid State Devices and Materials

Sep 27 - Sep 30, 2020
International Conference on Solid State Devices and Materials
2020 International Conference on Solid State Devices and Materials

2020 International Conference on Solid State Devices and Materials

Sep 27 - Sep 30, 2020

[A-1-04]Understanding wet annealing effect on phase transition and ferroelectric phase formation for Hf1-xZrxO2 film

〇Shigehisa Shibayama1, Jotaro Nagano1, Mitsuo Sakashita1, Osamu Nakatsuka1,2(1. Nagoya Univ.(Japan), 2. IMaSS, Nagoya Univ.(Japan))
https://doi.org/10.7567/SSDM.2020.A-1-04