International Conference on Solid State Devices and Materials
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2020 International Conference on Solid State Devices and Materials
Sep 27
- Sep 30, 2020
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2020 International Conference on Solid State Devices and Materials
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2020 International Conference on Solid State Devices and Materials
Sep 27
- Sep 30, 2020
[A-3-01 (Invited)]
Materials and Layer Transfer Process Technologies for Heterogeneous 3D Integration of Germanium on Silicon
〇Willy Rachmady
1
(1. Intel Corporation(United States of America))
https://doi.org/10.7567/SSDM.2020.A-3-01
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