2020 International Conference on Solid State Devices and Materials
Sep 27 - Sep 30, 2020
2020 International Conference on Solid State Devices and Materials
Sep 27 - Sep 30, 2020
[A-4-03]On-Wafer Electron Beam Detectors by Floating-Gate FinFET Technologies
Chih-An Yang1, 〇Jiun Shi Wang1, Jeng Burn Lin2, Jung Chrong Lin1, Chin Ya King1(1. Inst. of Electronics Engineering, National Tsing Hua Univ., Hsinchu(Taiwan), 2. Inst. of Photonics Technologies, National Tsing Hua Univ., Hsinchu(Taiwan))
