2020 International Conference on Solid State Devices and Materials

2020 International Conference on Solid State Devices and Materials

Sep 27 - Sep 30, 2020
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International Conference on Solid State Devices and Materials
2020 International Conference on Solid State Devices and Materials

2020 International Conference on Solid State Devices and Materials

Sep 27 - Sep 30, 2020

[A-4-04]On-Wafer Recorders for Assessing Wide Range Plasma Induced Charging Effect in FinFET Processes

Chi - Su1, 〇Yi-Jie Chao1, Chring-Jung Lin1, Ya-Chin King1(1. National Tsing Hua Univ.(Taiwan))
https://doi.org/10.7567/SSDM.2020.A-4-04
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