2020 International Conference on Solid State Devices and Materials
Sep 27 - Sep 30, 2020
2020 International Conference on Solid State Devices and Materials
Sep 27 - Sep 30, 2020
[A-6-01 (Invited)]Metal-Assisted Solid Phase Crystallization of Vertical Si Channel in 3D Flash Memory
〇Hidenori Miyagawa1, Haruka Kusai1, Riichiro Takaishi1, Tomoya Kawai1, Yuuichi Kamimuta1, Toshiya Murakami1, Keiko Ariyoshi1, Takanori Asano1, Masakazu Goto1, Makoto Fujiwara1, Yuichiro Mitani1, Tomoyuki Obu2, Hideaki Aochi1(1. Kioxia Corp.(Japan), 2. Western Digital Corp.(Japan))
