2020 International Conference on Solid State Devices and Materials

2020 International Conference on Solid State Devices and Materials

Sep 27 - Sep 30, 2020
International Conference on Solid State Devices and Materials
2020 International Conference on Solid State Devices and Materials

2020 International Conference on Solid State Devices and Materials

Sep 27 - Sep 30, 2020

[A-6-05]Millisecond Post Deposition Annealing for Improving the EOT and Dit in TiN/HfO2/SiO2/Si Gate Stacks using Flash Lamp Annealing

〇Hikaru Kawarazaki1, Akitsugu Ueda1, Shinichi Kato1, Kento Izumi2, Yasuo Nara2(1. SCREEN Semiconductor Solutions Co., Ltd.(Japan), 2. Univ. of Hyogo(Japan))
https://doi.org/10.7567/SSDM.2020.A-6-05