International Conference on Solid State Devices and Materials

2020 International Conference on Solid State Devices and Materials

Sep 27 - Sep 30, 2020

International Conference on Solid State Devices and Materials

2020 International Conference on Solid State Devices and Materials

Sep 27 - Sep 30, 2020

[A-5-02]A Triple-Deck CFET Structure with an Integrated SRAM Cell for the 2nm Technology Node and Beyond

〇Bingqi Sun¹, Qingpeng Wang², Shaofeng Yu¹(1. Fudan University(China), 2. Coventor, LamResearch Company(United States of America))

https://doi.org/10.7567/SSDM.2020.A-7-04